Signal-to-Noise Ratio Improvement in Electron Beam Testing by Using a Dispersive Analyser

Authors

L. Dubbeldam, Delft University of Technology
P. Kruit, Delft University of Technology

Abstract

In conventional e-beam testers the potential of a device under test is measured by collecting the secondary electrons (SE's) faster than a certain limit, while the slower SE's are rejected. We have built an e-beam tester in which the slower SE's are also collected. In this paper we will show that this can decrease the minimum measurable voltage substantially. An additional advantage of a double channel analyser is the possible reduction of the influence of fluctuations in the primary beam and in the secondary emission coefficient.

Recommended Citation

Dubbeldam, L. and Kruit, P. (1987) "Signal-to-Noise Ratio Improvement in Electron Beam Testing by Using a Dispersive Analyser," Scanning Microscopy: Vol. 1: No. 4, Article 16.
Available at: https://digitalcommons.usu.edu/microscopy/vol1/iss4/16