Development of an Scanning Tunneling Microscopy-Based Electron Beam Induced Current (EBIC) Microscope

Authors

P. Koschinski, Bergische Universitat Wuppertal
V. Dworak, Bergische Universitat Wuppertal
P. E. West, TopoMetrix
L. J. Balk, Bergische Universitat Wuppertal

Abstract

Measurements of electron beam induced currents (EBIC) can either be performed in a scanning electron microscope (SEM) or in a scanning tunneling microscope (STM), since both microscopes are very similar in their basic assembly. However, a straightforward application of an STM in EBIC-measurements, i.e. the use of a microscope tip as a fine source for low energetic electrons is not possible due to the specific demands on the instrument in an EBIC application. The present paper gives a compilation of these demands and describes their conversion into an optimized STM-EBIC microscope.

Recommended Citation

Koschinski, P.; Dworak, V.; West, P. E.; and Balk, L. J. (1996) "Development of an Scanning Tunneling Microscopy-Based Electron Beam Induced Current (EBIC) Microscope," Scanning Microscopy: Vol. 10: No. 1, Article 3.
Available at: https://digitalcommons.usu.edu/microscopy/vol10/iss1/3