Scanning Microscopy
Abstract
Experimental findings of insulator sputtering with slow multiply charged ions are reviewed with particular emphasis on proton sputtering, including recent studies which pay attention not only to the yields, but also to the energy distributions of sputtered particles. A simplified scenario of multiply charged ion interaction with a solid surface is discussed, which consists of two stages, i.e., resonant charge transfers well above the surface (the stage I), and a violent collision with the surface transferring a major part of the potential energy (the stage II). A couple of processes relating to the sputtering in the stages I and II are discussed, which include a Coulomb explosion, an Auger stimulated desorption and its variations, and a pair-wise repulsion between charged species in the stage I. It is shown that the third process reproduces several important aspects of proton sputtering with multiply charged ions.
Recommended Citation
Yamazaki, Yasunori and Kakutani, Nobukazu
(1996)
"Potential Sputtering of Protons with Slow Multiply Charged Ions,"
Scanning Microscopy: Vol. 10:
No.
3, Article 3.
Available at:
https://digitalcommons.usu.edu/microscopy/vol10/iss3/3