High Resolution Secondary Electron Imaging in a Scanning Transmission Electron Microscopy Instrument

Authors

J. Liu, Arizona State University
J. M. Cowley, Arizona State University

Abstract

High resolution and high quality secondary electron (SE) images can be obtained in a dedicated scanning transmission electron microscopy (STEM) instrument under normal operating conditions. Small gold particles less than 1 nm in diameter can be imaged in the SE mode and fine details on surface morphology can be revealed clearly by secondary electron imaging. Applications of SEM study of surface step structures are presented. Secondary electron image intensity variations of different MgO smoke crystals with electron beam irradiation time are discussed. Contrast mechanisms for secondary electron imaging of specimen surfaces and future improvements in obtaining ultra-high resolution SE images are pointed out. The potential of SEM study in a STEM instrument is realized by combining this technique with other modes used for STEM study.

Recommended Citation

Liu, J. and Cowley, J. M. (1987) "High Resolution Secondary Electron Imaging in a Scanning Transmission Electron Microscopy Instrument," Scanning Microscopy: Vol. 2: No. 1, Article 7.
Available at: https://digitalcommons.usu.edu/microscopy/vol2/iss1/7