Metal Ion and Cluster Beams for Microelectronic Research and Development: A Review

Authors

G. Ben Assayag, Laboratoire L2M-CNRS
P. Sudraud, Laboratoire L2M-CNRS

Abstract

Applications of focused ion and cluster beams emitted by liquid metal ion sources are particularly attractive in microelectronic engineering. We overview this area of research and development adding recent results concerning repair, tuning and characterization obtained either by focusing ions or droplets on a microcircuit controlled by in-situ SEM observation of the process.

Recommended Citation

Assayag, G. Ben and Sudraud, P. (1988) "Metal Ion and Cluster Beams for Microelectronic Research and Development: A Review," Scanning Microscopy: Vol. 2: No. 3, Article 10.
Available at: https://digitalcommons.usu.edu/microscopy/vol2/iss3/10