Scanning Tunneling Microscopy Methods for Spectroscopic Imaging of Subsurface Interfaces

Authors

L. D. Bell, California Institute of Technology
W. J. Kaiser, California Institute of Technology

Abstract

A new method for spatially-resolved, spectroscopic investigation of subsurface interface structure has been developed. The method, Ballistic Electron Emission Microscopy (BEEM), is based on Scanning Tunneling Microscopy (STM) techniques. BEEM combines STM vacuum tunneling with unique ballistic electron spectroscopy capabilities. BEEM enables, for the first time, direct imaging of subsurface interface electronic properties with nanometer spatial resolution. STM topographic images of surface structure and BEEM images of subsurface properties are obtained simultaneously. BEEM capabilities are demonstrated by investigation of important metal-semiconductor interfaces.

Recommended Citation

Bell, L. D. and Kaiser, W. J. (1988) "Scanning Tunneling Microscopy Methods for Spectroscopic Imaging of Subsurface Interfaces," Scanning Microscopy: Vol. 2: No. 3, Article 2.
Available at: https://digitalcommons.usu.edu/microscopy/vol2/iss3/2