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Scanning Microscopy

Abstract

This paper describes a multiple detector system based on a high-dispersion highly-corrected spectrometer close-coupled to a high-excitation objective lens. The design enables all post-specimen detectors (including the elastic dark-field detector) to be transferred to the post-spectrometer region.

This in turn makes possible the simultaneous acquisition of filtered bright-field, elastic dark-field and inelastic images.

The associated data acquisition system has provision for up to four simultaneous inputs and is based on a 32-bit microprocessor with 2 Mbytes of memory and 85 Mbytes of local disk storage. Images can be archived locally (cassette tape) or transferred via Ethernet to the laboratory central computer facility for off-line processing.

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