Analysis of Insulator Samples by Secondary Neutral Mass Spectrometry

Authors

Hans Oechsner, University of Kaiserslautern

Abstract

Secondary Neutral Mass Spectrometry (SNMS) offers new possibilities for the analysis of insulators when the electron component of the postionizing SNMS plasma is employed for a precise compensation of sample charging. The compensation techniques for the three operation modes of SNMS, namely the direct, the separate and the external bombardment mode are described. Corresponding examples for bulk and depth profile analysis of insulating samples and dielectric thin film systems will be reported and discussed.

Recommended Citation

Oechsner, Hans (1989) "Analysis of Insulator Samples by Secondary Neutral Mass Spectrometry," Scanning Microscopy: Vol. 3: No. 2, Article 2.
Available at: https://digitalcommons.usu.edu/microscopy/vol3/iss2/2