Scanning Microscopy


This paper is a part of a study on the use of a single-polepiece lens as an objective lens of an analytical scanning electron microscope (SEM). The single-polepiece lens has proved to be very suitable for the efficient collection of backscattered electrons (BSE) with a multielement semiconductor detector. For the BSE images in the sum and difference modes the contrast is a non-monotonic function of the excitation of the lens, due to the complicated nature of the BSE trajectories. The use of a six-element semiconductor detector provides a whole variety of BSE signal compositions in the conventional SEM as well

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