Collection of Backscattered Electrons with a Single Polepiece Lens and a Multiple Detector

Authors

I. Müllerová, Czechoslovak Academy of Sciences
M. Lenc, Czechoslovak Academy of Sciences
M. Florián, Tesla Brno

Abstract

This paper is a part of a study on the use of a single-polepiece lens as an objective lens of an analytical scanning electron microscope (SEM). The single-polepiece lens has proved to be very suitable for the efficient collection of backscattered electrons (BSE) with a multielement semiconductor detector. For the BSE images in the sum and difference modes the contrast is a non-monotonic function of the excitation of the lens, due to the complicated nature of the BSE trajectories. The use of a six-element semiconductor detector provides a whole variety of BSE signal compositions in the conventional SEM as well

Recommended Citation

Müllerová, I.; Lenc, M.; and Florián, M. (1989) "Collection of Backscattered Electrons with a Single Polepiece Lens and a Multiple Detector," Scanning Microscopy: Vol. 3: No. 2, Article 3.
Available at: https://digitalcommons.usu.edu/microscopy/vol3/iss2/3