Scanning Microscopy


The design of an ultra-high vacuum scanning electron microscope (UHV SEM) with a single-pole-piece lens underneath the specimen is described with the possibility to guide backscattered (BSE) and secondary electrons (SE) which originate in the magnetic field of the single-polepiece lens to the detectors. Our new design of the single-pole-piece lens and in-lens deflection coils closely satisfy the condition of a variable axis immersion lens (VAIL), which results in very low deflection aberrations.

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