Scanning Electron Microscope with a Single-Polepiece Lens

Authors

V. Kolařík, Czechoslovak Academy of Sciences
I. Müllerová, Czechoslovak Academy of Sciences
M. Lenc, Czechoslovak Academy of Sciences

Abstract

The design of an ultra-high vacuum scanning electron microscope (UHV SEM) with a single-pole-piece lens underneath the specimen is described with the possibility to guide backscattered (BSE) and secondary electrons (SE) which originate in the magnetic field of the single-polepiece lens to the detectors. Our new design of the single-pole-piece lens and in-lens deflection coils closely satisfy the condition of a variable axis immersion lens (VAIL), which results in very low deflection aberrations.

Recommended Citation

Kolařík, V.; Müllerová, I.; and Lenc, M. (1989) "Scanning Electron Microscope with a Single-Polepiece Lens," Scanning Microscopy: Vol. 3: No. 4, Article 2.
Available at: https://digitalcommons.usu.edu/microscopy/vol3/iss4/2