Approximate Solutions of the Boltzmann Equation for Secondary Electron Emission: Results and Comparisons to Experiments

Authors

A. Dubus, Université Libre de Bruxelles
J. Devooght, Université Libre de Bruxelles
J. C. Dehaes, Université Libre de Bruxelles

Abstract

The aim of the present paper is to survey the theoretical work performed in Brussels about secondary electron emission (SEE). Two new approximate solutions of the Boltzmann equation for internal secondary electrons are applied to both electron and ion induced SEE. Using a realistic set of interaction cross sections, most calculated characteristics of electron emission compare fairly well to experiments.

The "improved age-diffusion" model can be used to calculate the electron yield, the energy and angular spectrum and also the depth and radial distributions of outgoing electrons for incident electrons and ions.

The "transport-albedo" model assumes an uniform internal electron source in a semiinfinite medium and gives the electron yield and the energy spectrum of secondary electrons for incident light ions. Taking into account the anisotropy of the internal electron source, the ratio of the forward and backward yields and the influence of the angle of incidence have been calculated for thin targets.

Recommended Citation

Dubus, A.; Devooght, J.; and Dehaes, J. C. (1990) "Approximate Solutions of the Boltzmann Equation for Secondary Electron Emission: Results and Comparisons to Experiments," Scanning Microscopy: Vol. 4: No. 1, Article 1.
Available at: https://digitalcommons.usu.edu/microscopy/vol4/iss1/1