Azimuthal Variations of Sensitivity in the Coaxial Scanning Auger Microprobe

Authors

L. Frank, Czechoslovak Academy of Sciences

Abstract

Experiments with the PHI 595 Multiprobe have revealed a pronounced asymmetry of the energy filtered image (the shape of the line-scan curve) obtained with an isolated sphere lying on a flat surface. The effect is explained as a consequence of transmission efficiency variations along the circumference of the ring-shaped detector assembly, and is probably caused by deviations from coaxiality of the adjustable parts of the entrance annular aperture controlling the energy resolution. A quantitative model provides realistic results and has indicated the emission anisotropy of Auger electrons as being much larger than that of the energy filtered background emission at various energies.

Recommended Citation

Frank, L. (1990) "Azimuthal Variations of Sensitivity in the Coaxial Scanning Auger Microprobe," Scanning Microscopy: Vol. 4: No. 1, Article 8.
Available at: https://digitalcommons.usu.edu/microscopy/vol4/iss1/8