Integrated Single Crystal Detector for Simultaneous Detection of Cathodoluminescence and Backscattered Electrons in Scanning Electron Microscopy

Authors

Rudolf Autrata, Czechoslovak Academy of Sciences
Josef Jirák, Technical University, Brno
Jiří Špinka, Technical University, Brno
Otakar Hutař, Technical University, Brno

Abstract

The design of the majority of the available high efficiency cathodoluminescence (CL) detection systems allows the secondary electron (SE) and backscattered electron (BSE) image modes to be detected simultaneously to a limited degree only. The described CL-BSE detector is based on the single crystal YAG scintillator shaped as a spherical mirror which reflects photons emitted from the CL specimen and focuses them on to the entrance surface of a fibre optic light guide connected to the photomultiplier tube (PMT I). The backscattered electrons emitted from the CL specimen move through the reflecting layer of the mirror into the YAG scintillator where they are transformed into photons and guided using a fixed light guide to the PMT II. This allows the simultaneous recording of CL and BSE image modes without changing the specimen position. The detector design does not obstruct the simultaneous detection of SEs by the conventional SE detector. The examples of the simultaneous CL, SE and BSE detection given demonstrate deeper understanding of the specimens properties in different fields of science.

Recommended Citation

Autrata, Rudolf; Jirák, Josef; Špinka, Jiří; and Hutař, Otakar (1992) "Integrated Single Crystal Detector for Simultaneous Detection of Cathodoluminescence and Backscattered Electrons in Scanning Electron Microscopy," Scanning Microscopy: Vol. 6: No. 1, Article 3.
Available at: https://digitalcommons.usu.edu/microscopy/vol6/iss1/3