So far results of scanning electron acoustic microscopy (SEAM) have retained a widely qualitative meaning only due to the enormous uncertainty in understanding sound generation and contrast mechanisms in SEAM micrographs. In this work, a detailed treatment of these mechanisms has been undertaken for silicon resulting in precise knowledge of the signal generation processes and a well understood interpretation of the contrast mechanisms involved in imaging thermo-mechanical and electronic features.
Domnik, M. and Balk, L. J.
"Quantitative Scanning Electron Acoustic Microscopy of Silicon,"
Scanning Microscopy: Vol. 7
, Article 6.
Available at: https://digitalcommons.usu.edu/microscopy/vol7/iss1/6