Mentor
T.-C. Shen
Document Type
Report
Publication Date
4-2019
First Page
1
Last Page
4
Abstract
I approached Dr. Shen with a desire for a project in understanding how to manage and expand the capabilities of a laboratory. After some discussion, my senior project was to complete a gas and water chiller system to an existing furnace for chemical vapor deposition. It should be able to handle temperatures up to 1100 ºC, hold a vacuum to mTorr, be easy to move samples in and out of the furnace, and cost effective.
Recommended Citation
Koskan, Joshua, "Thermal Oxidation of Silicon in a Home-Made Furnace System" (2019). Physics Capstone Projects. Paper 76.
https://digitalcommons.usu.edu/phys_capstoneproject/76