Atom-scale electronics based on dopant patterns in silicon

Authors

T. C. Shen, Utah State UniversityFollow

Document Type

Presentation

Publication Date

6-4-2004

Recommended Citation

Talk at The 48th international conference on electron, ion and photon beam technology & nanofabrication, San Diego, 6/4/2004. “Atom-scale electronics based on dopant patterns in silicon”