Fabrication processes for atom-scale FETs, cellular automata and quantum computers

Authors

T. C. Shen, Utah State UniversityFollow

Document Type

Presentation

Publication Date

11-30-1999

Recommended Citation

Talk at International Symposium on Surface Science for Micro- and Nano-device fabrication ( ISSS-3), Waseda University, Japan, 11/30/99. (Invited) “Fabrication processes for atom-scale FETs, cellular automata and quantum computers”