Document Type

Article

Journal/Book Title/Conference

Ultramicroscopy

Issue

44

Publication Date

1-1-1992

First Page

1464

Last Page

1469

Abstract

Detection of surface forces between a tip and sample has been demonstrated with a piezoelectric cantilever in a scanning force microscope (SFM). The use of piezoelectric force sensing is particularly advantageous in semiconductor applications where stray light from conventional optical force-sensing methods can significantly modify the local carrier density. Additionally, the piezoelectric sensors are simple, provide good sensitivity to force, and can be batch fabricated. Our piezoelectric force sensors will be described, the theoretical sensitivity and performance of piezoelectric sensors will be discussed and experimental measurements of sensitivity and imaging results will be presented.

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