Location
University of Utah
Start Date
6-19-1998 9:45 AM
Description
A novel method for generating boron nitride thin films is currently being developed. This method utilizes the energy stored in the precursor molecules to grow films at low temperatures. The mechanism for film growth has been studied, both experimentally and computationally, with promising results.
Boron Nitride Thin Films from High Energy Gas Phase Reactants
University of Utah
A novel method for generating boron nitride thin films is currently being developed. This method utilizes the energy stored in the precursor molecules to grow films at low temperatures. The mechanism for film growth has been studied, both experimentally and computationally, with promising results.