Scanning Electron Microscopy


A review of available Depth-Dose functions determined both experimentally and by Monte-Carlo simulation in a variety of materials reveals that, although there is general agreement as to the shape of the function, there is considerable disagreement concerning quantitative measures such as the range of the incident electrons and the position of the maximum of the Depth-Dose curve relative to the range. This finding is contrary to the typical assumption that the shape of the Depth-Dose curve is not dependent on the beam energy and only slightly dependent on the target material.

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