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Scanning Electron Microscopy

Volume 1982, Number 1 (1982) Electron Beam Interactions With Solids for Microscopy, Microanalysis, & Microlithography

Articles

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Backscattering of Electrons from Complex Structures
M. Kisza, Z. Maternia, and Zbigniew Radzimski

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Analytical Scanning Electron Microscopy for Surface Science
Olive Lee-Deacon, Claude Le Gressus, and Daniel Massignon

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Electron Beam Induced Chemistry of Lithographic Materials
Jacob Pacansky, Adolfo Gutierrez, and Richard Kroeker

This is the proceedings of the 1st Pfefferkorn Conference. Held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA.