Scanning Electron Microscopy


We report on the development of a Scanning Low Energy Diffraction Microscope, operating in the range of 250 to 1000 eV primary energy. By discriminating against inelastically scattered electrons, low energy electron diffraction (LEED) patterns are obtained from areas of about 100 nm in size. By selecting a particular diffracted beam dark-field images of the surface structure are obtained in the scanning mode. Examples are given for polycrystalline Si and clean and adsorbate covered Si (111) surfaces.

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