Low Energy Electron Diffraction with Microscopic Resolution

Authors

J. Kirschner, Institut für Grenzflächenforschung und Vakuumphysik
T. Ichinokawa, Waseda University
Y. Ishikawa, Waseda University
M. Kemmochi, Waseda University
N. Ikeda, Waseda University
Y. Hosokawa, Waseda University

Abstract

We report on the development of a Scanning Low Energy Diffraction Microscope, operating in the range of 250 to 1000 eV primary energy. By discriminating against inelastically scattered electrons, low energy electron diffraction (LEED) patterns are obtained from areas of about 100 nm in size. By selecting a particular diffracted beam dark-field images of the surface structure are obtained in the scanning mode. Examples are given for polycrystalline Si and clean and adsorbate covered Si (111) surfaces.

Recommended Citation

Kirschner, J.; Ichinokawa, T.; Ishikawa, Y.; Kemmochi, M.; Ikeda, N.; and Hosokawa, Y. (1986) "Low Energy Electron Diffraction with Microscopic Resolution," Scanning Electron Microscopy: Vol. 1986: No. 2, Article 1.
Available at: https://digitalcommons.usu.edu/electron/vol1986/iss2/1