Mapping Solid Surfaces with a Raman Microprobe

Authors

P. M. Fauchet, Princeton University

Abstract

By combining an optical microscope with a standard Raman scattering apparatus, information on the structure, composition, homogeneity, and stress state of solids can be obtained with one micron resolution. After a discussion of the advantages and implementation of the technique, we examine specific applications mostly taken from our own work dealing with laser-solid interactions. In particular, we examine the structural modifications produced during laser annealing of semiconductors and laser induced damage of thin films.

Recommended Citation

Fauchet, P. M. (1986) "Mapping Solid Surfaces with a Raman Microprobe," Scanning Electron Microscopy: Vol. 1986: No. 2, Article 9.
Available at: https://digitalcommons.usu.edu/electron/vol1986/iss2/9