Three Dimensional Secondary Ion Mass Spectrometry Imaging and Retrospective Depth Profiling

Authors

D. R. Kingham, VG IONEX LIMITED
A. R. Bayly, VG IONEX LIMITED
D. J. Fathers, VG IONEX LIMITED
P. Vohralik, VG IONEX LIMITED
J. M. Walls, VG IONEX LIMITED
A. R. Waugh, VG IONEX LIMITED

Abstract

Secondary Ion Mass Spectrometry (SIMS) for three dimensional analysis of materials is an exciting and rapidly developing technique. We describe a framestore datasystem for ion microprobe instruments and present images and three dimensional SIMS data acquired and processed with this system. The concept of retrospective depth profiling is introduced, particularly as a means to optimise concentration detection limits. We examine the dependence of concentration detection limits on spatial resolution.

Recommended Citation

Kingham, D. R.; Bayly, A. R.; Fathers, D. J.; Vohralik, P.; Walls, J. M.; and Waugh, A. R. (1987) "Three Dimensional Secondary Ion Mass Spectrometry Imaging and Retrospective Depth Profiling," Scanning Microscopy: Vol. 1: No. 2, Article 4.
Available at: https://digitalcommons.usu.edu/microscopy/vol1/iss2/4