Secondary Ion Mass Spectrometry (SIMS) for three dimensional analysis of materials is an exciting and rapidly developing technique. We describe a framestore datasystem for ion microprobe instruments and present images and three dimensional SIMS data acquired and processed with this system. The concept of retrospective depth profiling is introduced, particularly as a means to optimise concentration detection limits. We examine the dependence of concentration detection limits on spatial resolution.
Kingham, D. R.; Bayly, A. R.; Fathers, D. J.; Vohralik, P.; Walls, J. M.; and Waugh, A. R.
"Three Dimensional Secondary Ion Mass Spectrometry Imaging and Retrospective Depth Profiling,"
Scanning Microscopy: Vol. 1
, Article 4.
Available at: https://digitalcommons.usu.edu/microscopy/vol1/iss2/4