Scanning Microscopy


Secondary Ion Mass Spectrometry (SIMS) for three dimensional analysis of materials is an exciting and rapidly developing technique. We describe a framestore datasystem for ion microprobe instruments and present images and three dimensional SIMS data acquired and processed with this system. The concept of retrospective depth profiling is introduced, particularly as a means to optimise concentration detection limits. We examine the dependence of concentration detection limits on spatial resolution.

Included in

Life Sciences Commons