Spatially Sensitive Electron Energy Loss Spectroscopy

Authors

Helmut Kohl, Institut für Angewandte Physik, Germany

Abstract

Over the last decade electron energy loss spectroscopy has been increasingly used as a microanalytical technique. Under favorable conditions a spatial resolution better than 1 nm has been achieved. It is therefore possible to obtain spectroscopic information at an atomic scale. Such a spectrum can be used for the investigation of

- the elemental composition

- defect levels

- surface excitations

- the fine structure.

The spatial sensitivity of such experiments implies, that the initial or the final state of the scattered electrons must have a spatial structure. The theory for the scattering of wave packets will be discussed, focussing on the implications for the attainable spatial sensitivity in energy filtered images as well as in site-specific electron energy loss spectroscopy.

Recommended Citation

Kohl, Helmut (1990) "Spatially Sensitive Electron Energy Loss Spectroscopy," Scanning Microscopy: Vol. 1990: No. 4, Article 2.
Available at: https://digitalcommons.usu.edu/microscopy/vol1990/iss4/2