Scanning Microscopy


Monte Carlo calculations of secondary electron (SE) generation have been performed using a hybrid model of the exponential decay law and cascade multiplication process. The contributions of both valence and core electron excitations, and the production of secondaries by the volume plasmon decay, have been included. The calculation has been extended to include SE's with energies up to half the incident beam energy. The SE yield δSE1 component due to excitation by primary electrons, the SE yield δSE2 due to excitation by backscattered electrons, and the β coefficient are estimated using this model. Calculated SE yields, energy distributions, and β coefficients are in good agreement with the experimental data . The influence of elastic and inelastic scattering for angular distribution of the SE's is discussed.

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