Scanning Microscopy


The York multispectral analytical electron microscope (MULSAM) was the first instrument specifically designed to acquire and process multiple Auger, X-ray, backscattered electron, elastically scattered electron, scanning electron microscopy (SEM) and specimen absorption current images simultaneously. Analyzing combinations of these signals with multispectral correlation techniques yields more information than would normally be obtained by treating each image separately. This paper reports some of the multispectral methods we have investigated at York which may be of use to other workers. Included are (1) a method that corrects for beam current fluctuations during long acquisition runs which is based on the anti-correlation between SEM and specimen current images, (2) the classification of topography for crystalline specimens by correlation partitioning of backscattered electron images and (3) the enhancement of surface state contrast in multi spectral scanning tunneling microscopy (STM) images using the Hotelling transform. The last example is intended to demonstrate that these techniques can also be applied to other fields in microscopy.

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