Scanning Microscopy


Autotuning methods for transmission electron microscopy are reviewed, and a distinction is drawn between predictive and non-predictive methods. The predictive methods make better use of the input data and therefore need fewer images to carry out complete autotuning. They typically require high quality of input data, which can be best provided by cooled slow-scan charge-coupled device (CCD) cameras. Two predictive methods are considered in more detail. These are the tilt-induced image shift (TIS) method of Koster, van der Mast and de Ruijter, and a new automated diffractogram analysis (ADA) method, which is introduced in this paper. The ADA method is shown to be capable of accurately aligning, stigmating and focussing a TEM in less than 30 seconds using just three high resolution images, and of automatically calibrating all the needed microscope parameters.

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