Scanning Microscopy


Low energy electron scattering (LEES) courses in solids are described by using a strict theory and direct simulation method proposed in this paper: we have improved Pendry's method based on the partial wave expansion, which can be applied to calculate the elastic scattering between an electron and atoms. The contributions of shell electrons, conductive electrons and plasma excitations are considered in the calculation of the inelastic scattering; electron scattering and cascade process of secondary electrons are simulated by Monte Carlo method. The secondary electron yields, the energy spectra curve and the backscattering electron coefficients for Cu were evaluated at the various energies, the theoretical results are in agreement with the Koshikawa's experiments.

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