The Interpretation of X-Ray and Electron Signals Generated in Thin or Layered Targets

Authors

R. H. Packwood, CANMET-EMR
G. Remond, BRGM

Abstract

This work outlines the development of a comprehensive theory for the electron probe microanalyser and scanning electron microscope or SEM, that is intended to serve as a framework of understanding for those employing electron beam methods and as a basis for improved correction procedures. There is particular emphasis on applications to layered and non-uniform specimens. Starting from a simple Gaussian depth distribution of electrons and making assumptions about the X-ray production, a series of predictions of X-ray and electron signals are made for various target configurations. When compared with experimental measurements a series of interesting discoveries follow, which, taken altogether, lead to a more refined model with the promise of more accurate analyses and a better understanding of the physics involved.

Recommended Citation

Packwood, R. H. and Remond, G. (1992) "The Interpretation of X-Ray and Electron Signals Generated in Thin or Layered Targets," Scanning Microscopy: Vol. 6: No. 2, Article 6.
Available at: https://digitalcommons.usu.edu/microscopy/vol6/iss2/6