All Physics Faculty Publications
Title
Nanometer scale patterning and oxidation of silicon surfaces with an ultrahigh vacuum scanning tunneling microscope
Document Type
Article
Journal/Book Title/Conference
The Journal of Vacuum Science and Technology B
Issue
12
Publication Date
1994
First Page
3735
Recommended Citation
J. W. Lyding, G. C. Abeln, T.-C. Shen, C. Wang and J. R. Tucker, "Nanometer scale patterning and oxidation of silicon surfaces with an ultrahigh vacuum scanning tunneling microscope," J. Vac. Sci. Technol. B 12, 3735 (1994).
COinS
