All Physics Faculty Publications

Title

Impurity concentration profile in irradiation enhanced diffusion experiments

Document Type

Article

Journal/Book Title/Conference

Physics Letters A

Volume

49

Issue

2

Publication Date

8-26-1974

First Page

159

Last Page

160

DOI

10.1016/0375-9601(74)90717-8

Abstract

Experiments dealing with irradiation enhanced diffusion in semiconductors in which the exciting particles have a range less than the sample thickness are shown to be characterized by nonexponential diffusant concentration profiles as functions of lattice depth.

Comments

Published by Elsevier in Physics Letters A. Publisher PDF is available through link above. Publisher requires a subscription to access article.

http://www.sciencedirect.com/science/article/pii/0375960174907178