Start Date

5-2020 12:00 AM

Description

Windows for extreme ultraviolet (EUV) sources are challenging because of the lack of transparent materials in these wavelengths. Thus, differential pumping apertures and slits are standard. Our group has developed a carbon nanotube (CNT) window consisting of a dense array of square holes. The open area allows a large range of wavelengths to be transmitted, and the high density of holes restricts gas flow, allowing a large pressure difference with differential pumping. The versatility of CNTs allows us to select the peak transmission and pressure ratio (low/high). We have observed pressure ratios of 0.000924, 0.000667, 0.000494, and 0.00118 for air at 298 K with (width-heigth in microns) 50-301, 50-654, 50-1045, and 200-675, respectively for (high) pressures up to 1 torr.

Comments

Due to COVID-19, the Symposium was not able to be held this year. However, papers and posters were still submitted.

Available for download on Saturday, May 01, 2021

Share

COinS
 
May 1st, 12:00 AM

Extreme Ultraviolet Application of Carbon Nanotube Structures

Windows for extreme ultraviolet (EUV) sources are challenging because of the lack of transparent materials in these wavelengths. Thus, differential pumping apertures and slits are standard. Our group has developed a carbon nanotube (CNT) window consisting of a dense array of square holes. The open area allows a large range of wavelengths to be transmitted, and the high density of holes restricts gas flow, allowing a large pressure difference with differential pumping. The versatility of CNTs allows us to select the peak transmission and pressure ratio (low/high). We have observed pressure ratios of 0.000924, 0.000667, 0.000494, and 0.00118 for air at 298 K with (width-heigth in microns) 50-301, 50-654, 50-1045, and 200-675, respectively for (high) pressures up to 1 torr.