
All Physics Faculty Publications
Title
Nanoscale STM-patterning and chemical modification of the Si(100) surface
Document Type
Article
Journal/Book Title/Conference
Microelectronic Engineering
Issue
27
Publication Date
1995
First Page
23
Recommended Citation
G. C. Abeln, T.-C. Shen, J. R. Tucker, and J. W. Lyding, "Nanoscale STM-patterning and chemical modification of the Si(100) surface," Micro. Eng. 27, 23 (1995).