Fabrication of Atom-scale Devices by Patterning Donor delta-layers in Silicon

Authors

T. C. Shen, Utah State UniversityFollow

Document Type

Presentation

Publication Date

5-25-2006

Recommended Citation

Molecular Foundry Workshop at Lawrence Berkeley National Laboratory, Berkeley, CA, 5/25/06, (poster) “Fabrication of Atom-scale Devices by Patterning Donor delta-layers in Silicon”