Fabrication of nanoscale oxide patterns on Si(100) surface in UHV

Authors

T. C. Shen, Utah State UniversityFollow

Document Type

Presentation

Publication Date

10-17-1995

Recommended Citation

Talk at American Vacuum Society 42nd National Symposium, Minneapolis, 10/17/95. “Fabrication of nanoscale oxide patterns on Si(100) surface in UHV”