Simultaneous Reflection and Transmission Measurements of Scandium Oxide Thin Films in the Extreme Ultraviolet

Salt Lake Community College

This project intends to study thin films of scandium oxide in the extreme ultraviolet. The goal is to experimentally determine the EUV optical constants for scandium oxide thin films, so that the optical performance of these films can be accurately described. These constants are necessary to supplement the analysis of the performance of scandium thin films, and will also provide insight into the potential use of scandium oxide thin films in future coating schemes.