Laser-Assisted Electron-Beam Induced Deposition and Etching

Authors

Nicholas A. Roberts, Utah State UniversityFollow
J. D. Fowlkes
P. D. Rack
G. A. Magel
H. M. Marchman
C. D. Hartfield
T. M. Moore

Document Type

Presentation

Publication Date

2011

Recommended Citation

N.A. Roberts , J.D. Fowlkes, P.D. Rack, G.A. Magel, H.M. Marchman, C.D. Ha rtfield and T.M. Moore, Laser-Assisted Electron-Beam Induced Deposition and Etch ing, AVS, November 1, 2011, Nashville, TN, USA.