In situ Optical Imaging and Laser Processing in the SEM/FIB: A True E IPBN System

Authors

Nicholas A. Roberts, Utah State UniversityFollow
J. D. Fowlkes
P. D. Rack
G. A. Magel
H. M. Marchman
C. D. Hartfield
T. M. Moore

Document Type

Presentation

Publication Date

2011

Recommended Citation

N.A. Roberts , J.D. Fowlkes, P.D. Rack, G.A. Magel, H.M. Marchman, C.D. Ha rtfield and T.M. Moore, In situ Optical Imaging and Laser Processing in the SEM/FIB: A True E IPBN System, 55th International Conference on Electron, Ion, Photon Beam Technology and Nanofabricati on, May 31- June 3, 2011, Las Vegas, NV, USA.