Atomic scale desorption through electronic and vibrational excitation mechanisms

Authors

T. C. Shen, Utah State UniversityFollow
C. Wang
G. C. Abeln
J. R. Tucker
J. W. Lyding
Ph. Avouris
R. E. Walkup

Document Type

Article

Journal/Book Title/Conference

Science

Issue

268

Publication Date

1995

First Page

1590

Abstract

The scanning tunneling microscope has been used to desorb hydrogen from hydrogen-terminated silicon (100) surfaces. As a result of control of the dose of incident electrons, a countable number of desorption sites can be created and the yield and cross section are thereby obtained. Two distinct desorption mechanisms are observed: (i) direct electronic excitation of the Si-H bond by field-emitted electrons and (ii) an atomic resolution mechanism that involves multiple-vibrational excitation by tunneling electrons at low applied voltages. This vibrational heating effect offers significant potential for controlling surface reactions involving adsorbed individual atoms and molecules.

Recommended Citation

T.-C. Shen, C. Wang, G. C. Abeln, J. R. Tucker, J. W. Lyding, Ph. Avouris, R. E. Walkup, "Atomic scale desorption through electronic and vibrational excitation mechanisms," Science 268, 1590 (1995).