Miniaturized Monolithic Hollow-Waveguide Spectrometer for CubeSat-Based Remote Mid-Infrared Sensing
Abstract
Miniaturized monolithic waveguide devices have been designed as part of an ongoing project to develop a mini Fourier-Transform Spectrometer (micro-FTS) on a chip for remote sensing applications. One application of the micro-FTS waveguide device is remote atmospheric sensing via a CubeSat, providing a compact, lightweight platform for low-cost missions. Hollow-waveguide devices have been fabricated using photolithography and deep reactive ion etching (DRIE) techniques on silicon wafers. The devices were characterized using Scanning Electron Microscopy (SEM) and processed with a Focused Ion Beam (FIB) to remove debris produced by the manufacturing process. SEM analysis showed both silicon shards and over-deposition of gold within the waveguide channels as defects. Alternative manufacturing methods are being investigated to minimize defects and maintain the transmission integrity of the hollow waveguides.
Poster
Miniaturized Monolithic Hollow-Waveguide Spectrometer for CubeSat-Based Remote Mid-Infrared Sensing
Miniaturized monolithic waveguide devices have been designed as part of an ongoing project to develop a mini Fourier-Transform Spectrometer (micro-FTS) on a chip for remote sensing applications. One application of the micro-FTS waveguide device is remote atmospheric sensing via a CubeSat, providing a compact, lightweight platform for low-cost missions. Hollow-waveguide devices have been fabricated using photolithography and deep reactive ion etching (DRIE) techniques on silicon wafers. The devices were characterized using Scanning Electron Microscopy (SEM) and processed with a Focused Ion Beam (FIB) to remove debris produced by the manufacturing process. SEM analysis showed both silicon shards and over-deposition of gold within the waveguide channels as defects. Alternative manufacturing methods are being investigated to minimize defects and maintain the transmission integrity of the hollow waveguides.
